Non-volatile switching and memory devices using vertical nanotubes

ABSTRACT

Non-volatile and radiation-hard switching and memory devices using vertical nano-tubes and reversibly held in state by van der Waals&#39; forces and methods of fabricating the devices. Means for sensing the state of the devices include measuring capacitance, and tunneling and field emission currents.

RELATED APPLICATIONS

This application is a continuation of application Ser. No. 11/161,183filed on Jul. 26, 2005.

FIELD OF THE INVENTION

The present invention relates to the field of non-volatile memorydevices; more specifically, it relates to non-volatile switching andmemory devices using vertical nanotubes and the method of fabricatingnon-volatile switching and memory devices using vertical nanotubes.

BACKGROUND OF THE INVENTION

There is a continuing need to improve the performance, decrease thepower consumption and decrease the dimensions of solid-state electronicdevices, particularly those used as cells for memory devices and asswitching devices. Further, as semiconductor device sizes decrease,various sources of radiation have been shown to cause changes in stateof semiconductor-based memory and switching devices.

Therefore, there is a need for memory and switching devices that areboth non-volatile and radiation hard.

SUMMARY OF THE INVENTION

A first aspect of the present invention is a structure, comprising: aninsulating layer on a top surface of a substrate; an electricallyconductive bitline formed in the insulating layer or on a top surface ofthe insulating layer, a top surface of the bitline parallel to the topsurface of the substrate; a first electrically conductive wordlinehaving a bottom surface, a top surface and a first sidewall; a secondelectrically conductive wordline having a bottom surface, a top surfaceand a second sidewall, the top and bottom surfaces of the first andsecond wordlines parallel to the top surface of the bitline, the firstand second sidewalls about perpendicular to the top surface of thebitline, the first and second wordlines spaced apart, the first andsecond sidewalls facing each other; a dielectric layer between thebottom surfaces of the first and second wordlines and the top surface ofthe bitline; a dielectric first spacer on the first sidewall and adielectric second spacer on the second sidewall; the first and secondspacers spaced apart, the first and second spacers facing each other,and the top surface of the bitline exposed between the first and secondspacers; and at least one electrically conductive nanotube having afirst end and an opposite second end, the first end permanently attachedto the bitline, the at least one nanotube extending away from the topsurface of bitline.

A second aspect of the present invention is the first aspect of thepresent invention wherein the at least one nanotube is flexible and hasa length between the first and second ends such that a portion of theone or more nanotubes proximate to the second end may reversibly contacteither the first or the second spacers.

A third aspect of the present invention is the first aspect of thepresent invention wherein the at least one nanotube is reversibly heldin contact with the first or second spacers by van der Waals' forces.

A fourth aspect of the present invention is the first aspect of thepresent invention wherein the at least one nanotube is a carbonnanotube.

A fifth aspect of the present invention is the first aspect of thepresent invention wherein the at least one nanotube is a single-wallcarbon nanotube.

A sixth aspect of the present invention is the first aspect of thepresent invention further including: means for voltage biasing the firstwordline and the bitline opposite to the second wordline and for voltagebiasing the second wordline and the bitline opposite to the firstwordline.

A seventh aspect of the present invention is the first aspect of thepresent invention further including: means for detecting a spike ofcurrent on the first or second wordline or on the bitline or means forsensing a change in capacitance between the first wordline and thebitline or between the second wordline and the bitline.

An eighth aspect of the present invention is the first aspect of thepresent invention further including a third spacer on top of the firstspacer, a total thickness of the first and second spacers measuredperpendicular to the first sidewall greater than a thickness of thesecond spacer measured perpendicular to the second sidewall.

A ninth aspect of the present invention is the first aspect of thepresent invention further including: means for sensing a tunnelingcurrent through the second spacer, the current flow between the secondwordline and the bitline, the current flowing through the one or morenanotubes.

A tenth aspect of the present invention is the first aspect of thepresent invention further including: a first dielectric cap having abottom surface, a top surface and a third sidewall, the bottom surfaceof the first dielectric cap in direct physical contact and coextensivewith the top surface of the first wordline; a second dielectric caphaving a bottom surface, a top surface and a fourth sidewall, the bottomsurface of the second dielectric cap in direct physical contact andcoextensive with the top surface of the second wordline, the third andfourth sidewalls facing each other, the first spacer extending over andin direct physical contact with the third sidewall and the second spacerextending over and in direct physical contact with the fourth sidewall;and an electrically conductive third spacer on the first spacer and anelectrically conductive fourth spacer on the second spacer, the thirdand fourth spacers spaced apart, the third and fourth spacers facingeach other, a bottom surface of the third spacer facing and overhangingthe top surface of the bitline exposed between the first and secondspacers, and a bottom surface of the fourth spacer facing andoverhanging the top surface of the bitline exposed between the first andsecond spacers.

An eleventh aspect of the present invention is the tenth aspect of thepresent invention wherein: when an upper portion of the at least onenanotube proximate to the second end of the at least one nanotube is incontact with the first spacer, the second end of the at least onenanotube is positioned under but not touching a bottom surface of thirdspacer; and when the upper portion of the at least one nanotubeproximate to the second end of the at least one nanotube is in contactwith the second spacer, the second end of the at least one nanotube ispositioned under but not touching the bottom surface of fourth spacer.

A twelfth aspect of the present invention is the eleventh aspect of thepresent invention further including: means for voltage biasing the firstwordline and the third spacer opposite to the second wordline and thebitline and for voltage biasing the second wordline and the fourthspacer opposite to the first wordline.

A thirteenth aspect of the present invention is the eleventh aspect ofthe present further including: means for sensing a field emissioncurrent across a first gap between the second end of the at least onenanotube and the bottom surface of the third spacer when the upperportion of the at least one nanotube proximate to the second end of theat least one nanotube is in contact with the first spacer; and means forsensing a field emission current across a second gap between the secondend of the at least one nanotube and the bottom surface of the fourthspacer when the upper portion of the at least one nanotube proximate tothe second end of the at least one nanotube is in contact with thesecond spacer.

A fourteenth aspect of the present invention is the first aspect of thepresent invention wherein the bitline comprises a catalytic material forthe formation of carbon nanotubes.

BRIEF DESCRIPTION OF DRAWINGS

The features of the invention are set forth in the appended claims. Theinvention itself, however, will be best understood by reference to thefollowing detailed description of an illustrative embodiment when readin conjunction with the accompanying drawings, wherein:

FIGS. 1A through 1G are cross-sectional views illustrating fabricationof a device according to a first embodiment of the present invention;

FIG. 2 is an isometric cross-section of a device according to the firstembodiment of the present invention;

FIGS. 3A through 3G are cross-sectional views illustrating fabricationof a device according to a second embodiment of the present invention;

FIG. 4 is an isometric cross-section of a device according to the secondembodiment of the present invention;

FIGS. 5A through 5K are cross-sectional views illustrating fabricationof a device according to a third embodiment of the present invention;

FIG. 6 is an isometric cross-section of a device according to the thirdembodiment of the present invention; and

FIGS. 7, 8 and 9, are plan views illustrating memory arrays usingdevices according the embodiments of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Nanotubes are more correctly called fullerenes, which are closed-cagemolecules comprised of atoms arranged in hexagons and pentagons. Thereare two types of fullerenes, namely closed spheroid cage fullerenes alsocalled “bucky balls”, and fullerene tubes. Fullerene tubes come in twotypes, single-wall fullerenes tubes, which are hollow tube-likestructures or and multi-wall fullerene tubes. Multi-wall fullerenesresemble sets of concentric cylinders. Single-wall fullerenes arehereinafter called single-wall nanotubes (SWNT) and multi-wallfullerenes are hereafter called multi-wall nanotubes (MWNT).

While the present invention is described using electrically conductivesingle-wall and multiple-wall carbon nanotubes comprised ofsp²-hybridized carbon, electrically conductive or semi-conductivesingle-wall and multiple wall nanotubes comprised of other electricallyconductive or semi-conductive materials may be substituted forelectrically conductive or semi-conductive single or multi-wall carbonnanotubes. For the purposes of the present invention, the term carbonnanotube (CNT) denotes either a carbon SWNT or a carbon MWNT unlessotherwise specified.

CNTs used in the embodiments of the present invention are grown onelectrically conductive bitlines formed on or embedded in an insulatinglayer by exposing bitlines to a vapor mixture of a CNT precursor andoptionally a CNT catalyst at an elevated temperature. In one example,the CNT precursor is hydrocarbon or hydrocarbon isomer mixture and thebitline comprises iron (Fe), cobalt (Co), nickel (Ni) or other materialsknown in the art. In one example, formation of CNTs is performed atelevated temperatures between about 400° C. to about 900° C.

When non-carbon SWNTs and MWNTs are substituted for CNTs, besideschanges to reactants used to form the non-carbon SWNTs and MWNTs,appropriate changes to the composition of the bitline may be required,however, the material of the bitline remains an electrically conductivematerial.

FIGS. 1A through 1G are cross-sectional views illustrating fabricationof a device according to a first embodiment of the present invention. InFIG. 1A, formed on a top surface of a substrate 100 is a firstinsulating layer 105. The top surface of substrate 100 defines ahorizontal plane and a line perpendicular to the top surface ofsubstrate 100 defines a vertical direction. Formed on a top surface offirst insulating layer 105 is a bitline 110. Alternatively, bitline 110may be damascened into first insulating layer 105, top surfaces of thefirst insulating layer 105 and bitline 110 being coplanar (see FIG. 2).Formed on a top surface of bitline 110 (and exposed top surface of firstinsulating layer 105) is a first dielectric layer 115.

In one example, first insulating layer 105 comprises SiO₂. In oneexample, bitline 110 comprises Fe, Co, Ni, other conductiveCNT-catalytic material, or combinations thereof. In one example, bitline110 comprises a layer of Fe, Co, Ni, or other CNT catalytic material andcombinations thereof. In one example, bitline 110 comprises a layer Fe,Co, Ni, or other CNT catalytic material over a layer or layers oftungsten (W), titanium (Ti), tantalum (Ta), titanium nitride (TiN),tantalum nitride (TaN), copper (Cu), aluminum (Al) or combinationsthereof. In one example, first dielectric layer 115 comprises siliconnitride (Si₃N₄).

In FIG. 1B, a first electrically conductive wordline 120A and a secondelectrically conductive wordline 120B are formed on a top surface offirst dielectric layer 115. First and second wordlines 120A and 120B areeach covered by a respective dielectric cap 125 formed on respective topsurfaces of the wordlines. First and second wordlines 120A and 120B anddielectric caps 125 may be formed, for example, by deposition of aconductive layer on the top surface of first dielectric layer 115,deposition of a capping layer on a top surface of the conductive layerfollowed by a photolithographic masking process and an anisotropic etchto define the first and second wordlines and dielectric caps.

A photolithographic masking process includes, applying a layer ofphotoresist, exposing the photoresist to actinic radiation through apatterned mask that will block the radiation from reaching regions ofthe photoresist layer, and developing the photoresist layer to generatea pattern of photoresist. After etching of underlying structure, theislands of photoresist are removed.

In one example, first and second wordlines 120A and 120B comprise dopedpolysilicon, W, Ti, Ta, Cu, TiN, TaN, Al and combinations thereof. Inone example, dielectric caps 125 comprise Si₃N₄.

In FIG. 1C, a conformal second dielectric layer 130 is formed over allexposed surfaces of first dielectric layer 115, first and secondwordlines 120A and 120B, and dielectric caps 125. In one example, seconddielectric layer 130 comprises Si₃N₄. In one example, second dielectriclayer 130 is a high K (dielectric constant) material, examples of whichinclude but are not limited metal oxides such as Ta₂O₅, BaTiO₃, HfO₂,ZrO₂, Al₂O₃, or metal silicates such as HfSi_(x)O_(y) orHfSi_(x)O_(y)N_(z) or combinations of layers thereof. A high Kdielectric material has a relative permittivity above about 10. In oneexample, second dielectric layer 130 is about 7 nm to about 20 nm thick.

In FIG. 1D, a reactive ion etch (RIE) process is performed to form, fromsecond dielectric layer 130 (see FIG. 1C), dielectric sidewall spacers135 on sidewalls of first and second wordlines 120A and 120B.

In FIG. 1E, a second insulating layer 140 is formed. Top surfaces ofsecond insulating layer 140 are coplanar with top surfaces of dielectriccap 125. In one example, second insulating layer 140 may be formed bydeposition of a dielectric material to a depth greater than the distancebetween the top surface of first dielectric layer 115 and top surfacesof dielectric caps 125, followed by a chemical-mechanical-polish (CMP).In one example second insulating layer 140 comprises SiO₂.

In FIG. 1F, a trench 145 is formed between first and second wordlines120A and 120B exposing a top surface 150 of bitline 110 by removingsecond insulating layer 140 and first dielectric layer 115 from betweenthe wordlines. In one example, trench 145 is formed using aphotolithographic masking process followed by a RIE.

In FIG. 1G, one or more electrically semi-conductive or conductive CNTs155 are grown on exposed top surface 150 of bitline 110 between firstand second wordlines 120A and 120B. CNTs 155 have two opposite ends. Thefirst ends are permanently attached to bitline 110 but the second endsare not permanently attached to any other structure. CNTs 155 extendupward from bitline 110 in the generally vertical direction. In oneexample, growth conditions for CNTs 155 are selected so as to grow atleast one and up to a number of CNTs sufficient to cover exposeddielectric spacers 135 on one or the other of wordlines 120A or 120Bwith about a single layer of upper ends of CNTs 155. In one example, thegrowth of CNTs 155 is limited such that the CNTs do not extend above thetop surfaces of dielectric caps 125. CNTs 155 are flexible so as to beable to bend and temporally touch sidewall spacer 135 on wordline 120A(shown) or touch sidewall spacer 135 on wordline 120B. It is expectedthat single-wall CNTs will be more flexible than multi-wall CNTs.

Bitline 110, wordlines 120A and 120B, dielectric caps 125, dielectricspacers 135 and CNTs 155 comprise a switching or memory device (ormemory cell) 225 according to the first embodiment of the presentinvention. Substrate 100 may be a semiconductor substrate, for example abulk silicon or silicon-on-insulator (SOI) substrate, and includedevices such as transistors, capacitors, resistors, diodes and inductorswhich are wired together to form support circuits for device 225.

Operation of device 225 is described infra, in relationship to FIG. 2,but a discussion of van der Waals' forces is required first. Though notentirely understood, in general, van der Waals' forces are attractiveforces between molecules. Bonding in a molecule is caused by orbitingelectrons. Any given electrons may be thought of being on one side orthe other of a molecule in any one instance of time creating a surplusof negative charge on one side of the molecule and a lack of charge(positive charge) on the opposite side of the molecule, i.e. a dipole.When the dipoles on adjacent molecules are aligned positive pole tonegative pole, negative pole to positive pole, there is a weak andtransient electrostatic attraction. Since an object is made up of manymolecules, there are always a finite number of pairs molecules havingattracting dipoles. Van der Waals' forces are very small forces and canbe easily broken, but absent an external force to force two objectsapart, objects attached to one another by van der Waals' forces willremain attached. At the nano-scale, van der Walls; forces aresignificant forces.

Because van der Waals' forces do not require externally supplied power,the devices of the embodiments of the present invention when de-poweredwill retain the state in which they remained when last powered, and arethus non-volatile memory devices. Because van der Waals' forces are noteffected by ionizing radiation, the devices of the embodiments of thepresent invention will retain their state even when struck by ionizingradiation and are thus radiation-hard devices.

FIG. 2 is an isometric cross-section of a device according to the firstembodiment of the present invention. In FIG. 2, with a positive(negative) charge on first wordline 120A and a negative (positive)charge on second wordline 120B and bitline 110, CNTS 155 will becomenegatively (positively) charged and be attracted toward first wordline120A. With sufficient voltage applied between first wordline 120A andbitline 110, the upper ends of CNTs 155 will press against dielectricsidewall spacer 135 on first wordline 120A. With the voltagedifferential removed (first and second wordlines 120A and 120B andbitline all at the same potential), CNTS 155 will continue to stick tosidewall spacer 135 on first wordline 120A because of van der Wallattraction between molecules in CNTs 155 and molecules in dielectricsidewall spacer 135.

The location of CNTs 155 can be “flipped” by placing a positive(negative) charge on second wordline 120B and a negative (positive)charge on first wordline 120A and bitline 110, CNTS 155 will becomenegatively (positively) charged and be attracted toward second wordline120B. With sufficient voltage, applied between second wordline 120B andbitline 110, the upper ends of CNTs 155 will release from sidewallspacer 135 of first wordline 120A and move to and press against sidewallspacer 135 on second wordline 120B. With the voltage differentialremoved (first and second wordlines 120A and 120B and bitline all at thesame potential), CNTS 155 will continue to stick to dielectric sidewallspacer 135 on second wordline 120B because of van der Wall attractionbetween molecules in CNTs 155 and molecules in dielectric sidewallspacer 135.

The state (whether CNTs are attached to dielectric sidewall spacer 135of first wordline 120A or attached to dielectric sidewall spacer 135 ofsecond wordline 120B) can be sensed as a change in capacitance in thewordlines or a spike in current flow through the bitline.

FIGS. 3A through 3G are cross-sectional views illustrating fabricationof a device according to a second embodiment of the present invention.The initial fabrication steps for the second embodiment of the presentinvention are that same as illustrated in FIGS. 1A, 1B, 1C and 1D anddescribed supra. FIG. 3A is the same as FIG. 1D.

In FIG. 3B, a photolithographic masking process followed by an isotropicetch is performed to remove dielectric sidewall spacer 135 from asidewall 160B of second wordline 120B that is adjacent to first wordline120A, exposing sidewall 160B of the first wordline 120B. Sidewall 160Aof first wordline 120A is still covered by sidewall spacer 135.

In FIG. 3C, a conformal third dielectric layer 165 is formed over allexposed surfaces of first dielectric layer 115, dielectric caps 125,dielectric sidewall spacers 135, and exposed sidewall 160B of secondwordline 120B. In one example, third dielectric layer 165 comprisesSi₃N₄. In one example third dielectric layer 165 is a high K (dielectricconstant) material, examples of which include but are not limited tometal oxides such as Ta₂O₅, BaTiO₃, HfO₂, ZrO₂, Al₂O₃, or metalsilicates such as HfSi_(x)O_(y) or HfSi_(x)O_(y)N_(z) or combinations oflayers thereof. A high K dielectric material has a relative permittivityabove about 10. In one example, third dielectric layer 165 is about 1 nmto about 5 nm thick.

In FIG. 3D, a RIE process is performed to form, from third dielectriclayer 165 (see FIG. 3C), dielectric sidewall spacers 170 on dielectricsidewall spacers 135 of first wordline 120A, dielectric sidewall spacer135 of second wordline 120B, and sidewall 160B of second wordline 120B.

In FIG. 3E, second insulating layer 140 is formed as described supra inreference to FIG. 1E. In FIG. 3F, trench 145 is formed between first andsecond wordlines 120A and 120B exposing a top surface 150 of bitline 110as described supra in reference to FIG. 1F. In FIG. 3G, one or moreelectrically conductive CNTs 155 are grown on exposed top surface 150 ofbitline 110 between first and second wordlines 120A and 120B asdescribed supra in reference to FIG. 1G.

Bitline 110, wordlines 120A and 120B, dielectric caps 125, dielectricsidewall spacers 135, dielectric spacers 170, and CNTs 155 comprise aswitching or memory device (or memory cell) 230 according to the secondembodiment of the present invention. Substrate 100 may be asemiconductor substrate, for example a bulk silicon orsilicon-on-insulator (SOI) substrate, and include devices such astransistors, capacitors, resistors, diodes, and inductors which arewired together to form support circuits for device 230. Operation ofdevice 230 is described infra, in relationship to FIG. 4.

FIG. 4 is an isometric cross-section of a device according to the secondembodiment of the present invention. Change of state of device 230 issimilar to that described for device 225 in reference to FIG. 2.However, the method of sensing the state of device 230 is different fromthat described for device 225 (see FIG. 2). The state (whether CNTs 155are attached to dielectric spacer 170 on dielectric sidewall spacer 135of first wordline 120A or attached to dielectric spacer 170 of secondwordline 120B) can be sensed as a flow of tunneling leakage current (aflow of electrons through the dielectric) from second wordline 120B,through dielectric spacer 170, through CNTs 155 to bitline 110 when CNTs155 are attached to dielectric spacer 170 of second wordline 120B by vander Waals' forces. There is no current flow (or a much smaller currentflow) from first wordline 120A to bitline 110 when CNTs 155 are attachedto dielectric spacer 170 on dielectric sidewall spacer 135 of firstwordline 120A.

Tunneling leakage current is a flow of current through dielectric spacer170 is similar to tunneling current flow in a field effect transistor(FET). Tunneling current flow in a FET is current flow from the gate,through the gate dielectric into the channel and thence to either thesource or the drain. Tunneling leakage current is different from normalcurrent flow from the source to the drain (or vice versa) in a FET whenthe gate of the FET is at the threshold voltage (V_(T)) of the device.Tunneling leakage current is different from sub-threshold leakagecurrent flow from the source to the drain (or vice versa) in a FET whenthe gate of the FET is below threshold voltage (V_(T)) of the device

Therefore, a dielectric spacer 170 should to be thin enough to allowtunneling leakage current while the thickness of a dielectric sidewallspacer 135 or the combined thickness of a dielectric spacer 170 and adielectric sidewall spacer 135 should be thick enough to precludetunneling leakage current or at least prevent it rising above apredetermined current level.

FIGS. 5A through 5K are cross-sectional views illustrating fabricationof a device according to a third embodiment of the present invention.The initial fabrication steps for the third embodiment of the presentinvention are that same as illustrated in FIGS. 1A, 1B, 1C and 1D anddescribed supra, with the exception that dielectric cap 125 of FIGS. 1B,1C and 1D is replaced with a significantly thicker dielectric cap 175 inFIG. 5A. Otherwise FIG. 5A is similar to FIG. 1D. In one example,dielectric cap 175 comprises Si₃N₄ and is about 0.85 to about 1.5 timesas thick as wordlines 120A and 120B as measured in a directionperpendicular to the top surface of substrate 100.

In FIG. 5B, a second insulating layer 180 is formed. A top surface of asecond insulating layer 180 is coplanar with top surfaces of dielectriccap 175. In one example, second insulating layer 180 may be formed bydeposition of a dielectric material to a depth greater than the distancebetween the top surface of first dielectric layer 115 and top surfacesof dielectric caps 175, followed by a CMP. In one example secondinsulating layer 180 comprises SiO₂.

In FIG. 5C, a trench 185 is formed between first and second wordlines120A and 120B exposing top surface 150 of bitline 110 by removing secondinsulating layer 180 and first dielectric layer 115 from between thewordlines. In one example, trench 185 is formed using aphotolithographic masking process followed by a RIE.

In FIG. 5D, one or more electrically conductive or semi-conductive CNTs190 are grown on exposed top surface 150 of bitline 110 between firstand second wordlines 120A and 120B. CNTs 190 have two ends. The firstends are permanently attached to bitline 110 but the second ends are notpermanently attached to any other structure. In one example growthconditions for CNTs 190 are selected so as to grow at least one and upto a number of CNTs sufficient to cover exposed dielectric sidewallspacers 135 on one or the other of wordlines 120A or 120B with about asingle layer of upper ends of CNTs 190. CNTs 190 may extend (as shown)above the top surfaces of dielectric caps 175 or may be shorter and notextend above the top surfaces of dielectric caps 175.

In FIG. 5E, the space (trench 185 of FIG. 5C) between wordlines 120A and120B is filled with fill material 195 and a CMP performed to so a topsurface of fill material 195 is coplanar with top surfaces of dielectriccaps 175. This CMP also polishes away any portions of CNTs 190 thatextended above top surface of dielectric caps 175, forming CNTs 190A. Inone example fill material 195 comprises poly-crystalline or amorphousgermanium (Ge).

In FIG. 5F, upper portions of fill layer 195 are removed to form atrench 200 partially filled with fill material 195. Upper portions ofsecond insulating layer 180 can also be removed. Next, CNTs 190A of FIG.5E are also reduced in height, to the same height as the remainingportion of fill layer 195, to form CNTS 190B. These three operations maybe performed as one, two or three distinct etch operations. In the caseof two operations, the CNTs 190 may be etched along with the fillmaterial 195, the CNTs 190 may be etched along with the secondinsulating layer 180, or the fill material 195 may be etched along withthe second insulating layer 180.

In FIG. 5G, a conformal conductive layer 200 is formed over all exposedsurfaces of second insulating layer 180, fill material 195, dielectricsidewall spacers 135, and dielectric caps 175. In one example,conductive layer 200 comprises WSi_(x), TiSi₂, TiN, TaN, dopedpolysilicon, or combinations thereof.

In FIG. 5H, an RIE is performed to form conductive spacers 205 onexposed sidewall surfaces of dielectric sidewall spacers 135.

In FIG. 5I, fill material 195 (see FIG. 5F) is removed. In the exampleof fill material 195 being Ge, an etch in aqueous hydrogen peroxide(H₂O₂) or other oxidizing solution may be used to remove the fillmaterial 195. CNTs 190B are now free-standing.

In FIG. 5J, an isotropic etch (for example a wet etch or a high pressureplasma etch) is performed to remove a small amount of material fromconductive spacers 205 (see FIG. 5I) generating conductive spacers 205Aand a field emission gap 235 having of dimension G between bottom edgesof conductive spacers 205A and top ends of CNTS 190B. In one example, Gis between about 4 nm and about 10 nm.

In FIG. 5K, CNTs 155 are flexible so as to be able to bend andtemporally touch dielectric sidewall spacer 135 on first wordline 120A(shown) or touch dielectric sidewall spacer 135 on second wordline 120B.Bitline 110, wordlines 120A and 120B, dielectric sidewall spacers 135,dielectric caps 175, conductive spacers 205A, and CNTs 190B comprise aswitching or memory device (or memory cell) 240 according to the thirdembodiment of the present invention. Substrate 100 may be asemiconductor substrate, for example a bulk silicon orsilicon-on-insulator (SOI) substrate, and include devices such astransistors, capacitors, resistors, diodes and inductors which are wiredtogether to form support circuits for device 240. Operation of device240 is described infra, in relationship to FIG. 6.

FIG. 6 is an isometric cross-section of a device according to the thirdembodiment of the present invention. Change of state of device 240 issimilar to that described supra for device 225 in reference to FIG. 2.However, the method of sensing the state of device 230 is different fromthat described for device 225 (see FIG. 2). The state (whether CNTs 190Bare attached to dielectric sidewall spacer 135 of first wordline 120A orattached to dielectric sidewall spacer 135 of second wordline 120B byvan der Waals' forces) can be sensed as a flow of field emission currentfrom bitline 110 to conductive spacer 205A of first wordline 120A toconductive spacer 205A of second wordline 120B. To enhance the amount offield emission current, polarities may be adjusted so that conductivespacers 205A are anodes and CNTs 190B cathodes. Therefore it is usefulto keep bitline 110 negative and opposite polarities on wordlines 120Aand 120B, the conductive spacers associated with the positive wordlinebeing the anode through which current will flow.

FIGS. 7, 8 and 9, are plan views illustrating memory arrays usingdevices according the embodiments of the present invention. FIG. 7illustrates a first array of memory cells 210 using devices according tothe first and second embodiments of the present invention. In FIG. 7, afirst cell comprises wordlines WL1 and WL2, CNTs CNT1 and bitline BL1. Asecond cell comprises wordlines WL3 and WL4, CNTs CNT2 and bitline BL1.A third cell comprises wordlines WL1 and WL2, CNTs CNT3 and bitline BL2.A fourth cell comprises wordlines WL3 and WL4, CNTs CNT4 and bitlineBL2. To write the first cell of array 210, wordline WL1 is brought upwhile wordlines WL2, WL3, and WL 4 are brought down. The state of BL1will then determine whether CNTs CNT1 are attracted to, and attach viavan der Waals' forces to, WL1 or WL2. All cells between wordlines WL1and WL2 must be written simultaneously. While writing the first cell ofarray 210 WL3 and WL4 are shorted together so that the second cell isnot disturbed.

FIG. 8 illustrates a second array of memory cells 215 using devicesaccording to the first and second embodiments of the present invention.In FIG. 8, a first cell comprises wordlines WL1 and WL2, CNTs CNT1 andbitline BL1. A second cell comprises wordlines WL2 and WL3, CNTs CNT2and bitline BL1. A third cell comprises wordlines WL3 and WL4, CNTs CNT3and bitline BL1. A fourth cell comprises wordlines WL4 and WL5 (notshown), CNTs CNT4 and bitline BL1. A fifth cell comprises wordlines WL1and WL2, CNTs CNT5 and bitline BL2. A sixth cell comprises wordlines WL2and WL3, CNTs CNT6 and bitline BL2. A seventh cell comprises wordlinesWL3 and WL4, CNTs CNT7 and bitline BL2. An eighth cell compriseswordlines WL4 and WL5 (not shown), CNTs CNT8 and bitline BL2.

To write the second cell of array 215, wordline WL1 and WL2 are broughtup while wordlines WL3, WL4 and WL 5 are brought down. In the array ofFIG. 8, in order not to disturb inactive wordline bits, all wordlines tothe “left” of the active cell (i.e. wordline WL1) are “shorted” to theactive wordline, wordline WL2, and all wordlines to the “right” of theactive cell (i.e. wordlines WL3 and WL4) are shorted together and towordline WL2. (They are held at the opposite polarity to the “left-hand”wordlines).

FIG. 9 is similar to FIG. 7, except a third array of memory cells 220comprises devices according to the third embodiment of the presentinvention. In FIG. 9, a first cell comprises wordlines WL1 and WL2, CNTsCNT1, bitline BL1, and anodes (conductive spacers) A1 and A2. A secondcell comprises wordlines WL1 and WL2, CNTs CNT2 bitline BL2, and anodesA1 and A2. A third cell comprises wordlines WL3 and WL4, CNTs CNT3,bitline BL1, and anodes A3 and A4. A fourth cell comprises wordlines WL3and WL4, CNTs CNT4, bitline BL2, and anodes A3 and A4. To write thefirst cell of array 220, wordline WL1 is brought up, wordlines WL2, WL3and WL 4 are brought down, and the bitline potential is setappropriately, depending on which “side” of the first cell CNTs CNT1 areto attach. To read the first cell, bitline BL1 is biased negatively, andother bitlines and anodes A1 and A2 are biased positively. A tunnelcurrent will become established only between CNTs CNT1 and only theanode on the side of the first cell to which the CNTs CNT1 are attached.

Devices according to the third embodiment of the present invention maybe arranged into arrays similar to those depicted in FIGS. 7 and 8. Thenumber of cells illustrated in FIGS. 7, 8 and 9 are to be taken asexemplary and any number of cells arranged in any number of rows andcolumns may be fabricated.

Thus, the embodiments of the present invention provide memory andswitching devices that are both non-volatile and radiation hard.

The description of the embodiments of the present invention is givenabove for the understanding of the present invention. It will beunderstood that the invention is not limited to the particularembodiments described herein, but is capable of various modifications,rearrangements and substitutions as will now become apparent to thoseskilled in the art without departing from the scope of the invention.Therefore, it is intended that the following claims cover all suchmodifications and changes as fall within the true spirit and scope ofthe invention.

1. A structure, comprising: a first insulating layer on a top surface ofa substrate; an electrically conductive bitline on a top surface of saidfirst insulating layer; a second insulating layer on a top surface ofsaid bitline, a region of said top surface of said bitline exposed in anopening in said second insulating layer; a first electrically conductivewordline formed on a top surface of said second insulating layer and adielectric first spacer on a sidewall of said first wordline, said firstspacer proximate to a first sidewall of said opening; a secondelectrically conductive wordline formed on said top surface of saidsecond insulating layer and a dielectric second spacer on a sidewall ofsaid second wordline, said second spacer proximate to a second sidewallof said opening; and at least one electrically conductive nanotubehaving a first end permanently attached to said top surface of saidbitline in said opening.
 2. The structure of claim 1, wherein said atleast one nanotube is flexible and has a length between said first endand an opposite second end such that a portion of said one or morenanotubes proximate to said second end can reversibly contact said firstspacer or said second spacer.
 3. The structure of claim 1, wherein saidat least one nanotube is reversibly held in contact with said firstspacer or said second spacer by van der Waals' forces.
 4. The structureof claim 1, wherein said at least one nanotube is a carbon nanotube. 5.The structure of claim 1, wherein said at least one nanotube is asingle-wall carbon nanotube.
 6. The structure of claim 1, furtherincluding: means for voltage biasing said first wordline and saidbitline opposite to said second wordline; and means for voltage biasingsaid second wordline and said bitline opposite to said first wordline.7. The structure of claim 1, further including: (i) means for detectinga spike of current on said first or second wordline or on said bitlineor (ii) means for sensing a change in capacitance between said firstwordline and said bitline or between said second wordline and saidbitline.
 8. The structure of claim 1, further including: a third spaceron said first spacer but not on said second spacer.
 9. The structure ofclaim 8, further including: means for sensing a presence of a tunnelingcurrent from said second wordline, through said second spacer, throughsaid one or more nanotubes to said bitline.
 10. The structure of claim1, further including: a dielectric first cap on a top surface of saidfirst wordline, said first spacer extending on a sidewall of first cap,an electrically conductive third spacer on an exposed sidewall of saidfirst spacer; a dielectric second cap on a top surface of said secondwordline, said second spacer extending on a sidewall of second cap, anelectrically conductive fourth spacer on an exposed sidewall of saidsecond spacer; and said third spacer and said fourth spacer positionedso that a second end of said one or more nanotubes cannot contact saidthird spacer or said fourth spacer, said second end opposite said firstend.
 11. The structure of claim 10, further including: said third spacerand said fourth spacer overhanging said opening.
 12. The structure ofclaim 1, wherein said bitline comprises a catalytic material for theformation of carbon nanotubes.
 13. A method, comprising: forming a firstinsulating layer on a top surface of a substrate; forming anelectrically conductive bitline on a top surface of said firstinsulating layer; forming a second insulating layer on a top surface ofsaid bitline, a region of said top surface of said bitline exposed in anopening in said second insulating layer; forming a first electricallyconductive wordline formed on a top surface of said second insulatinglayer and a dielectric first spacer over a sidewall of said firstwordline, said first spacer proximate to a first sidewall of saidopening; forming a second electrically conductive wordline formed onsaid top surface of said second insulating layer and a dielectric secondspacer on a sidewall of said second wordline, said second spacerproximate to a second sidewall of said opening; and forming at least oneelectrically conductive nanotube having a first end permanently attachedto said top surface of said bitline in said opening.
 14. The method ofclaim 13, wherein said at least one nanotube is flexible and has alength between said first end and an opposite second end such that aportion of said one or more nanotubes proximate to said second end canreversibly contact said first spacer or said second spacer.
 15. Themethod of claim 13, wherein said at least one nanotube is reversiblyheld in contact with said first spacer or said second spacer by van derWaals' forces.
 16. The method of claim 13, wherein said at least onenanotube is a carbon nanotube.
 17. The method of claim 13, wherein saidat least one nanotube is a single-wall carbon nanotube.
 18. The methodof claim 13, further including: forming a third spacer between saidfirst spacer and said sidewall of said first wordline.
 19. The method ofclaim 13, further including: forming a dielectric first cap on a topsurface of said first wordline, said first spacer extending on asidewall of first cap; forming an electrically conductive third spaceron an exposed sidewall of said first spacer; forming a dielectric secondcap on a top surface of said second wordline, said second spacerextending on a sidewall of second cap; forming an electricallyconductive fourth spacer on an exposed sidewall of said second spacer;and forming said third spacer and said fourth spacer positioned so thata second end of said one or more nanotubes cannot contact said thirdspacer or said fourth spacer, said second end opposite said first end.20. The method of claim 9 wherein said third spacer and said fourthspacer overhang said opening.
 21. The method of claim 13, wherein saidbitline comprises a catalytic material for the formation of carbonnanotubes
 22. A method, comprising providing a device comprising: afirst insulating layer on a top surface of a substrate; an electricallyconductive bitline on a top surface of said first insulating layer; asecond insulating layer on a top surface of said bitline, a region ofsaid top surface of said bitline exposed in an opening in said secondinsulating layer; a first electrically conductive wordline formed on atop surface of said second insulating layer and a dielectric firstspacer on a sidewall of said first wordline, said first spacer proximateto a first sidewall of said opening; a second electrically conductivewordline formed on said top surface of said second insulating layer anda dielectric second spacer on a sidewall of said second wordline, saidsecond spacer proximate to a second sidewall of said opening; and atleast one electrically conductive nanotube having a first endpermanently attached to said top surface of said bitline in saidopening; electrostatically attracting said at least one nanotube toeither said first or to said second spacer, an upper portion of said atleast one nanotube proximate to a second end of said at least onenanotube temporarily attached to either said first or second spacer byvan der Waals' forces; and sensing to which of said first or said secondspacers said at least one nanotube is temporarily attached.
 23. Themethod of claim 21, wherein said sensing includes: (i) measuring acapacitance change between said first wordline and said bitline ormeasuring a capacitance change between said second wordline and saidbitline or (ii) measuring a spike in current flow on said firstwordline, said second wordline or said bitline.
 24. The method of claim24, wherein said first spacer has a first thickness said second spacerhas a second thickness, said second thickness less than said firstthickness and wherein said method step of sensing includes measuring atunneling current flow between said second wordline and said bitline,said tunneling current flow passing through said second spacer, and saidat least one nanotube.
 25. The method of claim 22, said device furthercomprising: an electrically conductive third spacer on said first spacerand an electrically conductive fourth spacer on said second spacer, saidthird and fourth spacers overhanging said opening; and wherein saidmethod step of sensing includes measuring a field emission currentbetween in either said third or said fourth spacers and said bitline,said field emission current jumping a gap between said second end ofsaid at least one nanotube and said third spacer when said at least onenanotube is temporarily attached to said first spacer and said a fieldemission current jumping a gap between said second end of said at leastone nanotube and said fourth spacer when said at least one nanotube istemporarily attached to said second spacer.